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Abstract In this paper, the internal undesirable output is incorporated into the inputoutput index system, and the SBM model and EBM model are used to measure the innovation efficiency in the technological development stage, transformation stage and marketization stage in hightech industry. Research shows that: ① The threestage static innovation efficiency change trend first rises slightly and then descends, the East first descends and then rises, the West and Northeast first rise slightly and then descend, but the Central continues to descend. ②The dynamic efficiency of the technology development stage is growing, while the technological transformation stage and marketization stage are declining. Eastern efficiency has remained ahead, Northeast and West second, Central last. ③The dynamic efficiency of the technology development stage is mainly driven by the efficiency change but in the technological transformation stage and marketization stage it is dominated by relatively strong technological change. The East is driven by technological change, and the Central and West are driven by the efficiency change. The Northeast is driven by the efficiency change in the technological development stage and marketization stage, while the technological transformation stage depends on technological change.
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