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Abstract Based on the theory of innovation value chain, this paper divides China's manufacturing innovation activities into three links: technological production, materialized production and value production. And this paper uses DEA model to calculate the innovation efficiency of the three links in China's manufacturing industry. Then it builds the weight matrix of economic foundation space and uses spatial error model and spatial Dubin model to analyze the spatial spillover effect and value spillover effect of innovation efficiency in three links of manufacturing industry in China. The results show that whether from the industry perspective or the regional perspective, there is a high innovation efficiency in technological production and value production, while the innovation efficiency of the materialized production is low in China's manufacturing industry; in terms of the spatial spillover effect of innovation efficiency in all links of manufacturing industry, China's manufacturing industry shows significant spatial spillover effects on the efficiency of technological production, value production and materialized production; and the empirical results of the value chain spillover effect of the innovation efficiency of China's manufacturing show that the efficiency of technological production and the efficiency of materialized production, the efficiency of materialized production and the efficiency of value production both show obvious value chain spillover effects.
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