Abstract Based on the hightech industry of 9 provinces and municipalities in eastern China from 2012 to 2016, twostage and crossefficiency DEA model has been used to evaluate the efficiency of innovation in hightech industry. The results show that the overall efficiency of the hightech industry in eastern China is still low. However, the location advantages of different hightech industry are obvious. And there are different characteristics between the efficiency of the technological development stage and economic transformation stage. Combined with efficiency analysis results and management practice experience, taking Shandong Province as an example, feasibility suggestions have been proposed from the aspects of the innovation platform building, intellectual property protection and financial and human resources collaboration. Therefore, quantitative support for understanding the efficiency of hightech industry in the eastern coastal areas of China has been provided. Based on the qualitative comparative analysis, we find two types of precause configuration that trigger the hightech industry efficiency. By combining twostage data envelopment analysis, crossdata envelopment analysis and qualitative analysis, Shandong Province is taken as an example to propose further improvement of hightech industry efficiency, which provides a reference for hightech industry management practice.
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